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CVDU-650CC/5-DEF CAPACITANCE電容 FOR HDP 200MM
HEATER 300MM(0010-36734)
OLD 0190-36237 NEW 0190-51152 IV-2410AV-02H INJECTION VALVE PRODUCER
0200-39137 DOME
0200-35956 DPS POLY CERAMIC DOME
SY3000系列 EV MODULE 14-STATION FOR CHAMBER 特規品
0200-05113 NOZZLE ALN 2.28L X.014DIA 99% FLOW
HEATER PRODUCER CERAMIC HEATER(0010-03840)
0040-31844 WBL-055 BELLOWS LIFT PIN KSM
0040-42414 TOP COOLING PLATE
0010-36941 MATCH AMAT AUTO BIAS H.E. MATCH 200MM
0200-35287 INSULATOR BASE CATHODE DPS MEC DPS CERAMIC BASE
0021-01421 DPS METAL UPPER CHAMBER
0190-09597 APPLICATOR BODY ASP
0040-48594 ESC PECVD HDP ESC 300MM 0012CE594C0-01
0100-76050 PCB ASSY CENTURA I CONTROLLER I/O BOARD 大背板
0040-02609 LINER CATHODE MAGNET SUPER-E
0100-76061 PCB SYSTEM ELECTRONIC BACKPLANE
0200-18093 SIDE NOZZLE
0200-05112 NOZZLE ALN 2.28L X 014DIA 100 % FLOW
0010-30686 RF MATCH
0010-06121 EDTCU NEW AMAT PART
200mm DPS (DPS Etcher EDTCU/DTCU Hoist)
<RTP> LID, FAST COOLDOWN, ENP
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