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＞Spare Parts (Applied Materials (AMAT) )
＞Spare Parts (Applied Materials (AMAT) )
0100-00396 0100-20100 0110-01758 PCB, ANALOG IO ASSY
OLD 0040-47488 NEW 0040-86343 SIDE COIL ASSY ULTIMA PLUS 8"
3750-01137 FI20129 MAGNETRON HEAD ASP+ CIRCULATOR 導波管2
0015-09077 BUTTERFLY THROTTLE VALVE FOR 200MM
0190-16215 1110-00056 3155031-039 AE RF MATCH
0010-13663 ISOLATOR PHASE MAG FI80209導波管1
0010-39867 AMAT HV MODULE ASSY SUPER E
0010-12553 HV MODULE SUPER-E
0100-35231 PCB ASSY SERIPLEX I/O DISTRIBUTION
0190-21067 PALL DIFFUSER LOADLOCK 7EC4892-100M100
G12 TIN PROCESS KIT W/O COVER RING(0021-22028)(0020-25730)(0020-25077)(0020-2573
0020-29948 COIL SUPPORT CUP
0010-76149 HTHU HEATER 6"
0040-02544 DPS METEL UP CHAMBER
0200-10324 DOME CERAMIC FOR DPS METAL
0010-15668 ESC CERAMIC POLY DPS 8" SNNF
0010-05966 ESC ASSY NOTCH DUAL ZONE SUPER-E 8"
0190-16551 GMW-25A-2D0F3N0-003 GMW-25A ENI RF GENERATOR
0010-38755 ASSY R1-PRIME DTCU POLY DPS
0190-09769 ASTEX MAGNETRON HEAD AX2116
0010-05994 EMAX ESC 200MM
0010-05966 ESC ASSY NOTCH DUAL ZONE SUPER-E 8"
0010-39207 HIGH EFFICIENCY RF MATCH
AMAT COVER PLATE DIMPLE TYPE (0200-36631)
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